?????????????????????????????APPENDIX???????????????????????????????????????Chapter141-1?????????(???)??’99’00’01’02.3Q???23,51529,56516,00814,802?????3,0173,5912,0921,878???(%)12.8312.1413.0712.69???????1993?5?24???????????30??????DiffusionFurnace(?????)LP-CVD(????????)???77?(????23?)?????????????(?????36.5%)???????????1.??????????????2.?????·A/S?????3.???????4.?????·???????????(???????)????(???????)??/?????????SAS??HEA?????????????????(’02.3Q???????????????,??????????)5????1-2‘93??????????????????????????????’93.5.24????????????????????????Furnace?CVD??????????????????‘93????????????’92?DRAM??1?’93?Memory??1???????????95%????????6????(Oxidation)??(Expo